Raman spectroscopy characterization of nanostructured Al doped ZnO films

Properties of ZnO as a TCO (Transparent Conductive Oxide) have improved over the last two decades by doping with different types of dopant. ZnO and aluminum doped ZnO (AZO) samples deposited by PLD in different oxygen pressure from 0.01 to 200Pa. The effects of doping and different oxygen pressure on morphology were studied by SEM and Raman spectroscopy. Then the effects of 6 months aging of AZO samples were studied by Raman spectroscopy. Also AZO samples deposited in mixed atmosphere of argon and oxygen, with different oxygen partial pressure and the effects of different oxygen partial pressure during deposition were studied by Raman spectroscopy and SEM. At last one of the AZO samples annealed in different atmosphere (Argon and vacuum) and different temperature (350⁰C and 500⁰C) and changes in morphology were studied by Raman spectroscopy.